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ULVAC TECHNICAL JOURNAL No.76EDevelopment of An Automated High-Speed Spectroscopic Ellipsometer “UNECS-3000A” Yibing Song*, Keisuke Nozaki*, Chin Gai*, Fumihiko Omura*, Harukuni Furuse*, Manabu Kodaka* and Sad
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Document Date: 2013-05-31 11:02:07

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File Size: 637,93 KB

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Company

ULVAC Inc. / com- Maruzen Company Limited / /

IndustryTerm

optical devices / line applications / analysis software / thermal processing / deposition systems / optical systems / surement tool / chemical and other indus / /

Person

Manabu Kodaka / Hiroyuki Fujiwara / Fumihiko Omura / Sadao Sakurai / Keisuke Nozaki / Chin Gai / /

Position

sensor head / controller / /

Technology

semiconductor / phase modulation / lasers / /

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