Algorithmic MEMS University of California at Berkeley, Berkeley, CA[removed]Dartmouth College, Hanover, NH[removed]Karl Friedrich B ohringer,

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Date: 2003-07-05 01:47:00 Nanotechnology Mechanical engineering Microelectromechanical systems Transducers Electromagnetism Micromachinery Robotics Physics Microtechnology Actuators Technology		Algorithmic MEMS University of California at Berkeley, Berkeley, CA[removed]Dartmouth College, Hanover, NH[removed]Karl Friedrich B ohringer, Add to Reading List Source URL: www.ee.washington.edu Download Document from Source Website File Size: 611,67 KB Share Document on Facebook

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