![Spectroscopy / Electromagnetic spectrum / X-rays / Scattering / Extreme ultraviolet lithography / Polymer physics / Small-angle X-ray scattering / X-ray fluorescence / Interference lithography / Electromagnetic radiation / Physics / Scientific method Spectroscopy / Electromagnetic spectrum / X-rays / Scattering / Extreme ultraviolet lithography / Polymer physics / Small-angle X-ray scattering / X-ray fluorescence / Interference lithography / Electromagnetic radiation / Physics / Scientific method](https://www.pdfsearch.io/img/6f3262236d7a735e06e64720c282dc19.jpg)
| Document Date: 2015-02-03 08:51:10 Open Document File Size: 1,74 MBShare Result on Facebook
City Fribourg / Berlin / Villigen / Kielce / / Company Y. Ekinci Laboratory / Ge / / Country Poland / Germany / Switzerland / / / Facility Paul Scherrer Institute / Switzerland University of Fribourg / Institute of Physics / Jan Kochanowski University / / IndustryTerm chemical conditions / precise performance tool / softmatter systems / sample systems / micro-electronics industry / online monitor / resolution broadband mask technology / / Organization Institute of Physics / Switzerland University of Fribourg / Paul Scherrer Institut / Physics Department / Paul Scherrer Institute / / Person Nat / Jun Han / Andreas Menzel Paul Scherrer / Yves Kayser / / Product AuNPs / / SportsLeague Kielce / / Technology semiconductor / high-resolution broadband mask technology / Lithography / X-ray / /
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