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APPLIED PHYSICS LETTERS 90, 093116 共2007兲 Efficient electrothermal actuation of multiple modes of high-frequency nanoelectromechanical resonators I. Bargatin, I. Kozinsky, and M. L. Roukesa兲 Kavli Nanoscience Inst
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Document Date: 2007-11-04 15:43:17
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APPLIED PHYSICS LETTERS 90, 093116 共2007兲 Efficient electrothermal actuation of multiple modes of high-frequency nanoelectromechanical resonators I. Bargatin, I. Kozinsky, and M. L. Roukesa兲 Kavli Nanoscience Inst