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Materials science / Semiconductor device fabrication / Zinc oxide / Annealing / Positron annihilation spectroscopy / Center of Excellence in Nanotechnology at AIT / Chemistry / Spectroscopy / Ion implantation


JOURNAL OF APPLIED PHYSICS 97, Production and recovery of defects in phosphorus-implanted ZnO Z. Q. Chen,a) A. Kawasuso, Y. Xu, and H. Naramoto Advanced Science Research Center, Japan Atomic Energy Researc
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Document Date: 2004-12-15 21:11:22


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Porto / Berlin / B. / /

Company

World Scientific / F. D. Auret S. A. / T. C. Damen S. P. / T. Sekiguchi Nanomaterials Laboratory / Philips / Shimizu / Thin Solid Films / Ge / Scientific Production Company / /

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Japan / Singapore / /

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Product Issues / /

Facility

American Institute of Physics Downloaded / Japan Atomic Energy Research Institute / American Institute of Physics / T. Ohdaira National Institute of Advanced Industrial Science / National Institute of Advanced Industrial Science / H. Naramoto Advanced Science Research Center / National Institute / /

IndustryTerm

oxygen vacancy site / oxygen site / low energy / positron energy / incident energy / energy range / semiconductor devices / incident positron energy / chemical effects / large exciton binding energy / energy resolution / ion energy / electron-beam energy / energy / /

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Culture / Technology / Sports / Science / /

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American Institute of Physics Downloaded / National Institute for Materials Science / American Institute of Physics / A. Kawasuso / Y. Xu / and H. Naramoto Advanced Science Research Center / Japan R. Suzuki and T. Ohdaira National Institute of Advanced Industrial Science and Technology / Japan Atomic Energy Research Institute / National Institute of Advanced Industrial Science and Technology / Ministry of Education / /

Person

E. Van Nostrand / Hiroshi Harima / /

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Position

Professor / /

Product

crystals / /

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JOURNAL OF APPLIED PHYSICS / /

Technology

semiconductor / Radiation / laser / broadband / semiconductors / lasers / semiconductor devices / spectroscopy / Technology of Japan / recombination / /

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http /

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