![Microtechnology / Materials science / Electromagnetism / Electromagnetic radiation / Etching / Semiconductor device fabrication / Electrical engineering / Transducers / Microelectromechanical systems / Infrared / Crystalline silicon / Thermographic camera Microtechnology / Materials science / Electromagnetism / Electromagnetic radiation / Etching / Semiconductor device fabrication / Electrical engineering / Transducers / Microelectromechanical systems / Infrared / Crystalline silicon / Thermographic camera](https://www.pdfsearch.io/img/c1db18be108e6452f7b0db4f84b9db7f.jpg) Date: 2015-03-10 06:24:40Microtechnology Materials science Electromagnetism Electromagnetic radiation Etching Semiconductor device fabrication Electrical engineering Transducers Microelectromechanical systems Infrared Crystalline silicon Thermographic camera | | Vol. 25 • No. 9 • March 4 • 2015 www.afm-journal.de Advanced Functional Materials, Vol. 25, 2015, No. 9, pages 1329–1472 www.afm-journal.deAdd to Reading ListSource URL: rogers.matse.illinois.eduDownload Document from Source Website File Size: 2,75 MBShare Document on Facebook
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