![Chemistry / Matter / Optical materials / Parylene / Polymers / Materials science / Thin film deposition / Biomaterials / Microtechnology / Poly / LIGA / Thin film Chemistry / Matter / Optical materials / Parylene / Polymers / Materials science / Thin film deposition / Biomaterials / Microtechnology / Poly / LIGA / Thin film](https://www.pdfsearch.io/img/599364e64fa1405572ae7317ed8c85d9.jpg) Date: 2012-07-31 11:17:04Chemistry Matter Optical materials Parylene Polymers Materials science Thin film deposition Biomaterials Microtechnology Poly LIGA Thin film | | Characterization of Biocompatible Parylene-C Coatings for BIOMEMS Applications Quoc P. Nguyen a,*, Jost Goettert a, William T. Monroe b, Varshni Singh a a Center for Advanced Microstructures and Devices (CAMD), LouisianAdd to Reading ListSource URL: www.camd.lsu.eduDownload Document from Source Website File Size: 421,30 KBShare Document on Facebook
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