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Chemistry / Matter / Optical materials / Parylene / Polymers / Materials science / Thin film deposition / Biomaterials / Microtechnology / Poly / LIGA / Thin film
Date: 2012-07-31 11:17:04
Chemistry
Matter
Optical materials
Parylene
Polymers
Materials science
Thin film deposition
Biomaterials
Microtechnology
Poly
LIGA
Thin film

Characterization of Biocompatible Parylene-C Coatings for BIOMEMS Applications Quoc P. Nguyen a,*, Jost Goettert a, William T. Monroe b, Varshni Singh a a Center for Advanced Microstructures and Devices (CAMD), Louisian

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