Loss of implanted heavy elements during annealing of ultra-shallow ion-implanted silicon: The complete picture

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Date: 2014-08-08 03:45:28		Loss of implanted heavy elements during annealing of ultra-shallow ion-implanted silicon: The complete picture Add to Reading List Source URL: www.ciba.nus.edu.sg Download Document from Source Website File Size: 1,47 MB Share Document on Facebook