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Technology / Microelectromechanical systems / Etching / Deep reactive-ion etching / Microfabrication / Advanced Silicon Etch / Photoresist / Wankel engine / Wafer / Materials science / Semiconductor device fabrication / Microtechnology


Design and Fabrication of a Silicon-Based MEMS Rotary Engine
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Document Date: 2002-10-04 20:52:04

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File Size: 732,38 KB

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