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Technology / Microelectromechanical systems / Etching / Deep reactive-ion etching / Microfabrication / Advanced Silicon Etch / Photoresist / Wankel engine / Wafer / Materials science / Semiconductor device fabrication / Microtechnology


Design and Fabrication of a Silicon-Based MEMS Rotary Engine
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Document Date: 2002-10-04 20:52:04


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File Size: 732,38 KB

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City

New York / /

Company

UC Berkeley Microfabrication Laboratory / The Wankel RC Engine A.S. / The Silicon Technology Systems / MieroElectroMechanical Systems / Chilton Book Co. / McGraw-Hill / U.C. Berkeley's Microfabrication Laboratory / /

Country

United States / /

Currency

cent / /

/

Facility

Mechanical Engineering University of California at Berkeley Berkeley / /

IndustryTerm

high energy density liquid hydrocarbons / energy conversion / electrical and mechanical systems / high energy density / energy density / manufacturing techniques / steel using electron discharge machining / manufacturing / oil / thermal devices / electronic systems / thermoelectric devices / /

Organization

Congress / University of California / UC Berkeley / /

Person

Kelvin Fu / David C. Walther / Aaron J. Knobloch / Locldey / Carlos Fernandez-Pello / Fabian C. Martinez / Matthew Wasilik / Dorian Liepmann / /

/

Position

D.J. / /

Product

a -100 / R2 / /

ProgrammingLanguage

LISP / /

ProvinceOrState

New York / /

Technology

MEMS / Heat Transfer / fuel cells / CVD / Chemical Vapor Deposition / /

SocialTag