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Coatings / Plasma processing / Semiconductor device fabrication / Vacuum / Chemical vapor deposition / Silicon carbide / Chemistry / Manufacturing / Thin film deposition


Durable Coatings for IR Windows Lee M. Goldman, Santosh K. Jha, Nilesh Gunda, Rick Cooke, Neeta Agarwal, Suri A. Sastri, Alan Harker 1, Jim Kirsch2 Surmet Corporation, 33 B Street, Burlington, MA[removed]Rockwell Scienti
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Document Date: 2011-03-15 12:06:45


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City

Bellingham / Redstone Arsenal / Burlington / Sample / Thousand Oaks / /

Company

Rockwell Scientific Corporation / Surmet Corporation / Jim Kirsch2 Surmet Corporation / 3M / Rockwell Scientific Company / /

Country

United States / /

Currency

USD / /

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Event

Product Issues / Business Partnership / /

Facility

Dome Technologies / /

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IndustryTerm

hazardous chemicals / precursor gas ratio / precursor gas / gas ratio / precursor gas compositions / plasma-enhanced chemical vapor deposition / /

OperatingSystem

Dos / /

Organization

United States Army / Air Force / Department of Defense / /

Person

Nilesh Gunda / Randal W. Tustison / Absorption / Suri A. Sastri / Lee M. Goldman / Rick Cooke / Alan Harker / /

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Product

TukonR Microhardness Tester / chemicals / /

ProvinceOrState

Alabama / California / Massachusetts / Washington / /

Technology

av / CVD / chemical vapor deposition / /

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