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Date: 2009-12-03 00:39:18Coatings Amorphous solids Plasma processing Semiconductor device fabrication Amorphous carbon Amorphous silicon Diamond-like carbon Sputter deposition Carbon Chemistry Matter Thin film deposition | References References 163Add to Reading ListSource URL: dspace.fsktm.um.edu.myDownload Document from Source WebsiteFile Size: 163,11 KBShare Document on Facebook |