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Date: 2012-08-02 10:08:48 | Soft X-Ray Lithography for High-Aspect Ratio Sub-Micrometer Structures S. Lemkea, J. Goettertb*, T. Holubeka, B. Löchela, I. Rudolpha and T. Seligera a Helmholtz-Zentrum Berlin (HZB) für Materialien und Energie GmbH,Add to Reading ListSource URL: camd.lsu.eduDownload Document from Source WebsiteFile Size: 609,15 KBShare Document on Facebook |