plasma processing industry / gas gap / mean electron energy / source term accounting / electron energy equation / energy equation / threecomponent gas / energy transfer frequency / energy flux / electron mean energy / electron mean energy flux / vacuum systems / average decay frequency accounting / energy loss / energy density / display technology / energy mobility / gas heating / energy flux terms / surface treatment applications / numerical solutions / energy / /
Person
Johann Wolfgang Goethe-Universität / P. Stahel / V / /
2782 IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 36, NO. 5, OCTOBER 2008 Numerical Model of an Argon Atmospheric Pressure RF Discharge