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Plasma / CL2 / Laser / Physics / Optics / Astrophysics


Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl2 Laboratoire de Physique des Plasmas
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Document Date: 2012-05-24 09:19:32


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Pumping port Laboratoire de Physique / Plasmas ICP reactor / Industrial Scale Reactor / /

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gas density / /

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Jean-Paul Booth Nishant Sirse / Mark Kushner •Understand / Pascal Chabert / /

Technology

recombination / Laser / microwave / simulation / /

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