10. Sächsischer Archivtag 1. Sächsisch-Böhmisches Archivarstreffen 19. – 21. Oktober 2001 in Aue Grenzüberschreitende böhmischsächsische Beziehungen – Widerspiegelung im Archivwesen und

Source URL: www.vda.lvsachsen.archiv.net

F R A U N H O F E R - I N S T I T U T F Ü R I nte g rierte S y ste m e un d B aue l e m entete c hno l o g ie I I S B Materials for Electronics 1

Source URL: www.iisb.fraunhofer.de

• Superhard materials
• Nanomaterials
• Printed electronics
• Fraunhofer Society
• Silicon carbide
• Nanoparticle
• Gallium nitride
• Nanoelectronics
• Organic electronics
• Chemistry
• Materials science
• Ultraviolet radiation

FRAUNHOFER-INSTITUT FÜR I nte g rierte S y ste m e un d B aue l e m entete c hno l o g ie I I S B TOOL & FOUP Evaluation

Source URL: www.iisb.fraunhofer.de

• Science
• Chromatography
• Mass spectrometry
• Filters
• Measuring instruments
• Gas
• Vacuum pump
• Chemistry
• Chemical pathology
• Scientific method

FRAUNHOFER-INSTITUT FÜR I nte g rierte S y ste m e un d B aue l e m entete c hno l o g ie I I S B FAILURE ANALYSIS AND

Source URL: www.iisb.fraunhofer.de

• Scanning capacitance microscopy
• Characterization
• Electron microscope
• Scanning probe microscopy
• Failure analysis
• Transmission electron microscopy
• Focused ion beam
• Scanning electron microscope
• Energy-dispersive X-ray spectroscopy
• Scientific method
• Science
• Electron microscopy

F R A U N H O F E R - I N S T I T U T F Ü R I nte g rierte S y ste m e un d B aue l e m entete c hno l o g ie I I S B Devices 1

Source URL: www.iisb.fraunhofer.de

• Electronics
• Computer memory
• Power electronics
• Semiconductors
• Non-volatile memory
• Integrated circuit
• MOSFET
• Transistor
• Capacitor
• Technology
• Electronic engineering
• Semiconductor devices

FRAUNHOFER-INSTITUT FÜR I nte g rierte S y steme un d B aue l ementetechno l o g ie I I S B Research and development portfolio

Source URL: www.iisb.fraunhofer.de

• Electromagnetic radiation
• Nanotechnology
• Chemistry
• Spectroscopy
• Ellipsometry
• Radiometry
• Analytical chemistry
• Wafer
• Metrology
• Materials science
• Physics
• Semiconductor device fabrication

FRAUNHOFER-INSTITUT FÜR I nte g rierte S y ste m e un d B aue l e m entete c hno l o g ie I I S B CUSTOMIZED PATTERNING Full process chain from single

Source URL: www.iisb.fraunhofer.de

• Technology
• Etching
• Wafer
• Photolithography
• Resist
• Semiconductor fabrication plant
• Semiconductor device fabrication
• Materials science
• Microtechnology

FRAUNHOFER-INSTITUT FÜR I nte g rierte S y ste m e un d B aue l e m entetechno l o g ie I I S B Nanostructuring and characterization

Source URL: www.iisb.fraunhofer.de

• Science
• Integrated circuit
• Failure analysis
• Fraunhofer Society
• Nanoimprint lithography
• Electronics
• Photolithography
• Microfabrication
• Stanley Shanfield
• Materials science
• Microtechnology
• Technology

FRAUNHOFER-INSTITUT FÜR I nte g rierte S y steme un d B aue l ementete c hno l o g ie I I S B Yield Enhancement

Source URL: www.iisb.fraunhofer.de

• KLA Tencor
• Manufacturing
• Semiconductor device fabrication
• Wafer
• Technology

SAC H SE N STAN ISLAW T ILLIC H D AS MAL Z H AUS IN P L AUE N

Source URL: www.kas.de