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A Centrally-Clamped Parallel-Beam Bistable MEMS Mechanism Jin Qiu*, Jeffrey H. Lang, Alexander H. Slocum Massachusetts Institute of Technology * Room 3-470, 77 Massachusetts Avenue, Cambridge, MA 02139, USA Tel: +
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Document Date: 2000-11-12 18:40:55
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File Size: 186,29 KB
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