A Centrally-Clamped Parallel-Beam Bistable MEMS Mechanism Jin Qiu*, Jeffrey H. Lang, Alexander H. Slocum Massachusetts Institute of Technology * Room 3-470, 77 Massachusetts Avenue, Cambridge, MA 02139, USA Tel: - Avenue H - Document - PDFSEARCH.IO

First Page	Meta Content
	A Centrally-Clamped Parallel-Beam Bistable MEMS Mechanism Jin Qiu, Jeffrey H. Lang, Alexander H. Slocum Massachusetts Institute of Technology Room 3-470, 77 Massachusetts Avenue, Cambridge, MA 02139, USA Tel: + Add to Reading List Document Date: 2000-11-12 18:40:55 Open Document File Size: 186,29 KB Share Result on Facebook

A Centrally-Clamped Parallel-Beam Bistable MEMS Mechanism Jin Qiu*, Jeffrey H. Lang, Alexander H. Slocum Massachusetts Institute of Technology * Room 3-470, 77 Massachusetts Avenue, Cambridge, MA 02139, USA Tel: +Add to Reading List