Analysis of the Passivation Layer on Silicon Patterns Etched by Synchronously Pulsed Plasmas M. Haass, M. Darnon, E. Pargon, C. Petit-Etienne, L. Vallier, P. Bodart, G. Cunge, S. Banna, T. Lill, O. Joubert - Banna - Document - PDFSEARCH.IO

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	Analysis of the Passivation Layer on Silicon Patterns Etched by Synchronously Pulsed Plasmas M. Haass, M. Darnon, E. Pargon, C. Petit-Etienne, L. Vallier, P. Bodart, G. Cunge, S. Banna, T. Lill, O. Joubert Add to Reading List Document Date: 2012-05-24 09:17:16 Open Document File Size: 2,26 MB Share Result on Facebook Company Applied Materials / Pulsed Plasmas Challenges / INTEL / / Currency pence / / IndustryTerm e- e / energy / / Technology e- X-ray / X-ray / / URL www.technologyreview.com / / SocialTag Physics Astrophysics Plasma Passivation

Analysis of the Passivation Layer on Silicon Patterns Etched by Synchronously Pulsed Plasmas M. Haass, M. Darnon, E. Pargon, C. Petit-Etienne, L. Vallier, P. Bodart, G. Cunge, S. Banna, T. Lill, O. JoubertAdd to Reading List