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Analysis of the Passivation Layer on Silicon Patterns Etched by Synchronously Pulsed Plasmas M. Haass, M. Darnon, E. Pargon, C. Petit-Etienne, L. Vallier, P. Bodart, G. Cunge, S. Banna, T. Lill, O. Joubert
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Document Date: 2012-05-24 09:17:16
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Analysis of the Passivation Layer on Silicon Patterns Etched by Synchronously Pulsed Plasmas M. Haass, M. Darnon, E. Pargon, C. Petit-Etienne, L. Vallier, P. Bodart, G. Cunge, S. Banna, T. Lill, O. Joubert