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Materials science / Thin film deposition / Plasma physics / Coatings / Condensed matter physics / Sputtering / Molecular dynamics / Sputter deposition / Binary collision approximation / Physics / Chemistry / Science


SIMULATION OF SPUTTER DEPOSITION 1 2
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Document Date: 2015-01-16 02:41:24

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Country

Germany / /

/

Facility

Fraunhofer Institute / /

IndustryTerm

ion energy deposition / energy distribution / energy / /

Organization

Fraunhofer Institute for Electronic / /

Person

Hermann Wolf / Stefan E. Schulz / /

/

Technology

SIMULATION / /

SocialTag