Heat Load Experiments at CAMD and CLS D. Yemane1, S. Achenbach2, J. Goettert1, R. Guntaka3, D. Haluzan2, K. Nandakumar3, V. Singh1, V. Subramanian2, G. Wells2 1 LSU Center for Advanced Microstructures and Devices (CAMD),

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Date: 2012-07-25 17:48:50 Chemistry Materials science Physics Matter Microtechnology LIGA X-ray lithography Photoresist Canadian Light Source Resist Beamline Poly		Heat Load Experiments at CAMD and CLS D. Yemane1, S. Achenbach2, J. Goettert1, R. Guntaka3, D. Haluzan2, K. Nandakumar3, V. Singh1, V. Subramanian2, G. Wells2 1 LSU Center for Advanced Microstructures and Devices (CAMD), Add to Reading List Source URL: www.camd.lsu.edu Download Document from Source Website File Size: 3,63 MB Share Document on Facebook

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