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Chemistry / Materials science / Electromagnetic radiation / Microtechnology / Photolithography / Nanolithography / Photoresist / Electron-beam lithography / Mask / Ultraviolet / Resist / Atomic-force microscopy
Date: 2004-09-07 14:36:00
Chemistry
Materials science
Electromagnetic radiation
Microtechnology
Photolithography
Nanolithography
Photoresist
Electron-beam lithography
Mask
Ultraviolet
Resist
Atomic-force microscopy

Journal of Photochemistry and Photobiology A: Chemistry–154 Nanopatterning with conformable phase masks Joana Maria a , Seokwoo Jeon a , John A. Rogers a,b,∗ a

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Source URL: rogers.matse.illinois.edu

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