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IEEE Cledo Brunetti Award / Microfabrication / Supriyo Datta / Institute of Electrical and Electronics Engineers / Lithography / Jack Kilby / Integrated circuit / Immersion lithography / Intel / Technology / Engineering / Science


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City

Santa Clara / Hsin-Chu / Dallas / Cedex / Wilton / Tempe / Tokyo / Washington / DC / Sunnyvale / Cambridge / Veldhoven / Bologna / San Jose / /

Company

MICHAEL HATZAKIS IBM Corp. / Philips Research Labs / IBM / ABE OFFNER Perkin-Elmer Corp. / ALEC N. BROERS IBM Corporation / DAVID A. THOMPSON IBM Corp. / JR. INTEL Corp. / N. NOYCE Intel Corporation / Intel Corporation / ROBERT H. DENNARD IBM Corp. / TAKAFUMI NAMBU MITSURU IDA KAMON YOSHIYUKI SONY Corporation / EIJI TAKEDA Hitachi Ltd. / IRVING AMES - IBM Corp. / TSMC Ltd. / R. HERRIOTT Bell Labs / Texas Instrument / HIDEO SUNAMI Hitachi Ltd. / W. RUBINSTEIN Sprague Electric Co. / /

Country

Taiwan / Netherlands / Italy / France / Japan / United States / /

Facility

ROBERT E. FONTANA IBM Almaden Research Center / IEEE CLEDO BRUNETTI AWARD RECIPIENTS University of California / Nagasaki Institute of Applied Science Nagasaki / SHUN-ICHI IWASAKI Tohoku University / University of Massachusetts / University of Bologna / MARK LUNDSTROM SUPRIYO DATTA Purdue University / University of California / /

IndustryTerm

consumer electronics / projection lithography systems / nano-scale electronic devices / isolation technology / signal processing applications / logic technologies / nanometer imaging / integrated circuit devices / lithographic and patterning equipment / optical technologies / thermal management / hot-carrier effects / effect devices / surface acoustic wave electronic devices / layer transfer technology / magnetic recording systems / submicron electron devices / miniature magnetic devices / microelectronics manufacturing / electronic devices / metal oxide semiconductor / resolution patterning technologies / /

Organization

Department of Electrical Engineering Princeton University Princeton / MIT / University of California / Berkeley / Federal Supply Service Washington / University of Massachusetts / Amherst / University of Bologna / DAVID K. FERRY Arizona State Univ. / Tohoku University / Sendai / Purdue University / Stanford University Stanford / Cornell University / MITSUMASA KOYANAGI Tohoku Univ Intell Sys Lab Sendai / ROBERT E. FONTANA IBM Almaden Research Center San Jose / Nagasaki Institute of Applied Science Nagasaki / General Services Administration / RICHARD M. WHITE Univ of California / /

Person

MICHEL BRUEL / GEOFFREY W. A. DUMMER / Murray Hill / HENRY I. SMITH MIT / YAN BORODOVSKY / PHILIP J. FRANKLIN / RICHARD S. MULLER / DAVID J. FRANK / JACK S. KILBY / J. FRANKLIN GSA / R. FABIAN W. PEASE / GIORGIO BACCARANI / STEVEN E. LAUX / DIETER P. KERN GEORGE / E. HOFF / JR. / MATTHEW R. WORDEMAN / Fellow / ROGER T. HOWE RICHARD / SAM SIVAKUMAR / /

Position

Director of Advanced Lithography / Director of Lithography / Professor / Electrical and Computer Engineering / Director of Micropatterning Division / Vice President / ASML / Professor Emeritus / Professor / Director / Professor / EECS / Deputy Director of CEA-LETI / Director of Research / /

ProgrammingLanguage

DC / /

ProvinceOrState

Wisconsin / California / Massachusetts / /

Technology

semiconductor / semiconductor devices / lithography / random access / ion-beam and optical technologies / integrated circuits / silicon-on-insulator CMOS technology / high-density isolation technology / logic technologies / Smart Cut™ layer transfer technology / high resolution patterning technologies / simulation / integrated circuit / /

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