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Plasma Quebec’16; 1 et 2 juin 2016 à l’Université de Montréal. Radio-frequency Magnetron sputtering of ferroelectric Hf0.5Zr0.5O2 films; Processing and characterization F. Ambriz-Vargas1, R. Nouar2, A. Sarkissian
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Document Date: 2016-05-17 14:42:16
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Plasma Quebec’16; 1 et 2 juin 2016 à l’Université de Montréal. Radio-frequency Magnetron sputtering of ferroelectric Hf0.5Zr0.5O2 films; Processing and characterization F. Ambriz-Vargas1, R. Nouar2, A. Sarkissian