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 Date: 2008-12-29 17:55:23Technology Capacitive Micromachined Ultrasonic Transducers Microelectromechanical systems Etching Plasma-enhanced chemical vapor deposition Chemical vapor deposition Polycrystalline silicon Strain engineering Chemical-mechanical planarization Semiconductor device fabrication Materials science Chemistry |
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 | MATEC Web of Conferences 39 , ) DOI: m atecconf1 0 C Owned by the authors, published by EDP Sciences, 2016 Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using theDocID: 1p7X8 - View Document |
 | Hot Wire CVD of Heterogeneous Mater.Phys.Mechand Polycrystalline Silicon Semiconducting Thin Films for Application in Thin Film Transistors and Solar CellsDocID: 1odSw - View Document |
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 | Logo_EU_PVSEC_echtes_Vektor_cmyk_mit Hintergrund_und_RandDocID: 1fZmc - View Document |