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Materials science / Emerging technologies / Composite materials / Carbon nanotube / Electron microscope / Chemical vapor deposition / Tomography / Carbon / Carbon Nanotubes Supported Catalyst / Chemistry / Manufacturing / Carbon nanotubes


SLS Symposium on Imaging Tuesday, July 8, [removed]:00 to 12:15, WBGB[removed]:00 Electronically active dopant profiling of power semiconductor structures by complementary Scanning Probe Microscopy (SPM)
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Document Date: 2015-02-03 08:51:12


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City

Fourier / PARIS / /

Company

on Semiconductor / ABB Switzerland Ltd / Acs / Steiner S.A. / /

Country

Switzerland / /

/

Facility

University of Basel / Institute of Polymer Engineering University / Paul Scherrer Institute / University of Applied Sciences / Laboratory of Micro / /

IndustryTerm

phase-contrast imaging / iterative reconstruction algorithm / high processing temperatures / proposed iterative reconstruction algorithms / silicon technology / real-time tomographic imaging / design energy / high-energy interferometer / carrier distributions / energy range / semiconductor devices / metal catalyst chemical vapour deposition / composite applications / differential phase-contrast imaging / x-ray phase contrast imaging / high-energy interferometers / power electronics / dark-field imaging / i.e. aerospace / possible applications / iterative algorithms / metal catalyst / manufacturing processes / i . e .ii . e ..i . e .ei . e ..i . e . i . e .ai . e .ei . e .ri . e .oi . e .si . e .pi . e .ai . e .ci . e .ei . e . / /

Organization

University of Basel / Institute for Biomedical Engineering / Paul Scherrer Institut / Laboratory of Micro / Paul Scherrer Institut Grating / Department of Physics / Laboratory for Micro / Institut für Biomedizinische Technik / University of Applied Sciences / Paul Scherrer Institute / /

Person

Matteo Abis / Pattern Complexity Filippo Arcadu / M. Stampanoni / Paul Scherrer Insititute / C. David / Z. Wang / Ion Mass Spectroscopy / T. Thüring / Harald R. Rossmann / Ray Tomograms / F. Marone / Paul Scherrer / /

Position

*corresponding author / /

Product

Materials / /

PublishedMedium

Optics Express / Nature Physics / /

Region

Northwestern Switzerland / /

Technology

semiconductor / Radiation / Fourier-based iterative reconstruction algorithm / FOURIER-BASED ITERATIVE RECONSTRUCTION ALGORITHMS / otherwise iterative algorithms / x-ray / silicon technology / tomography / semiconductor devices / Cristallography / 15 Fourier-Based Iterative Reconstruction Algorithms / Image Processing / proposed iterative reconstruction algorithms / CVD / presented algorithms / /

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