![Chemistry / Optics / Reflectivity / Thermodynamics / Sputter deposition / Mirror / Plasma / Sputtering / Thin film deposition / Physics / Semiconductor device fabrication Chemistry / Optics / Reflectivity / Thermodynamics / Sputter deposition / Mirror / Plasma / Sputtering / Thin film deposition / Physics / Semiconductor device fabrication](https://www.pdfsearch.io/img/afb9c9d8702ed00632c87c8f34040c30.jpg)
| Document Date: 2014-06-11 01:09:35 Open Document File Size: 11,51 KBShare Result on Facebook
City Hefei / / Facility Longwei Chen Institute of Plasma Physics / / IndustryTerm auxiliary systems / stainless steel / gas puffing / / Organization Chinese Academy of Sciences / Longwei Chen Institute of Plasma Physics / / Person Rui Ding / / Technology Radio frequency / /
SocialTag |