![](https://www.pdfsearch.io/img/92a91cd18560e2a05122e275834d41ac.jpg) Date: 2005-09-09 08:33:38
| | Modeling and experimental investigation of bubble entrapment for flow over topography during immersion lithography Holly B. Burnett*a, Alex C. Weia, Mohamed S. El-Morsia, Timothy A. Shedda, Gregory F. Nellisa, Chris Van Add to Reading ListSource URL: sel.me.wisc.eduDownload Document from Source Website File Size: 1,12 MBShare Document on Facebook
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