![](https://www.pdfsearch.io/img/ecbf9ad9e8e7a5b4b04ff7e055bed6dc.jpg) Date: 2013-02-01 05:11:43
| | Solid phase epitaxy of ultra-shallow Sn implanted Si observed using highresolution Rutherford backscattering spectrometry T. K. Chan, F. Fang, A. Markwitz, and T. Osipowicz Citation: Appl. Phys. Lett. 101, );Add to Reading ListSource URL: www.ciba.nus.edu.sgDownload Document from Source Website File Size: 1,00 MBShare Document on Facebook
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