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$Electromagnetic radiation / Photonics / Diffraction grating / Extreme ultraviolet / Grating / Interference lithography / Electron beam lithography / Extreme ultraviolet lithography / Long-period fiber grating / Optics / Diffraction / Optical devices$	Nanostructuring News August 2010 25nm half-pitch EUV fabricated gratings now available Eulitha continues to add higher resolution structures to its line of standard Add to Reading List Document Date: 2014-05-05 05:11:39 Open Document File Size: 411,26 KB Share Result on Facebook

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Nanostructuring News August 2010 25nm half-pitch EUV fabricated gratings now available Eulitha continues to add higher resolution structures to its line of standardAdd to Reading List