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Technology / Energy / Microelectromechanical systems / Comb drive / Torsion spring / Microscanner / Deformable mirror / Microtechnology / Actuators / Materials science


LOW VOLTAGE AND PULL-IN STATE ADJUSTABLE DUAL-SERVO-SCANNING-MIRROR Kerwin Wang1, Mike Sinclair2, Karl F. Böhringer1 1 University of Washington, 2Microsoft Research Seattle, WA 98195
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Document Date: 2003-02-07 03:34:26

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File Size: 289,34 KB

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City

Gilbert / Seattle / Head Island / /

Company

IEEE Journal / Quantum Electronics / Las Vegas NV / /

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Facility

University of Washington / square Angular / /

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IndustryTerm

elegant devices / drive electronics / /

Organization

University of Washington / /

Person

B. McCarthy / V / Y. C. Lee / V / /

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ProvinceOrState

South Dakota / South Carolina / North Carolina / Washington / /

Technology

MEMS / Optical Fiber / /

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