“Application of thin-films to MEMS” Prof. João Pedro Conde Department of Chemical and Biological Engineering Instituto Superior Tecnico and INESC Microsistemas e Nanotecnologias, Rua Alves Redol, Lisbon - Condé - Document - PDFSEARCH.IO

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Date: 2012-05-16 09:18:20		“Application of thin-films to MEMS” Prof. João Pedro Conde Department of Chemical and Biological Engineering / Instituto Superior Tecnico and INESC Microsistemas e Nanotecnologias, Rua Alves Redol, Lisbon Add to Reading List Source URL: www.uninova.pt Download Document from Source Website File Size: 10,84 KB Share Document on Facebook