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Date: 2015-06-09 14:26:46 Semiconductor device fabrication Silicones PDMS stamp Nanoimprint lithography Ultraviolet Wafer Etching Gallium nitride Polydimethylsiloxane Chemistry Materials science Microtechnology		F R A U N H O F E R I N S T I T U T E F O R I N T E G R AT E D S Y S T E M S A N D D E V I C E T E C H N O L O G Y I I S B SERVICES AND SOLUTIONS FOR LARGE AREA NANOIMPRINT TECHNOLOGY CONTACT Add to Reading List Source URL: www.iisb.fraunhofer.de Download Document from Source Website File Size: 899,92 KB Share Document on Facebook

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