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Spectroscopy / Emission spectroscopy / Annealing / Silicide / Polycrystalline silicon / Photoemission spectroscopy / High-k dielectric / Absorption spectroscopy / Core electron / Chemistry / Physics / Science
Date: 2010-01-05 10:33:38
Spectroscopy
Emission spectroscopy
Annealing
Silicide
Polycrystalline silicon
Photoemission spectroscopy
High-k dielectric
Absorption spectroscopy
Core electron
Chemistry
Physics
Science

Photon Factory Activity Report 2006 #24 Part BSurface and Interface 2C/2005S2-002 Suppression of silicidation and crystallization by atmosphere controlled annealing

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