| Document Date: 2010-01-05 10:33:37
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City Tokyo / / Country Japan / / Currency pence / / / Facility Koji USUDA The University of Tokyo / Photon Factory / / IndustryTerm lower binding energy / higher binding energy / chemical vapour deposition / metal oxide semiconductor / / Organization High-Energy Accelerator Research Organization / University of Tokyo / Tokyo / Japan Science and Technology Agency / / RadioStation Core / / Technology semiconductor / radiation / spectroscopy / CVD / dielectric / x-ray / /
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Photon Factory Activity Report 2006 #24 Part BSurface and Interface 2C/2005S2-002 Analysis of x-ray irradiation effect in high-k gate dielectrics by time-dependent