| Document Date: 2015-06-18 05:45:50
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City Dresden / / / IndustryTerm pulse sputtering technology films / layer systems / minimum energy / sensor technology / sputter equipment / channel device / arc energy / software packages / technological tool / energy / / Organization Fraunhofer-Institut für Elektronenstrahl / / Person Rainer Labitzke / Peter Frach / / / ProgrammingLanguage DC / / ProvinceOrState New Brunswick / / Technology Pulse package sputtering technique PMS technologies / process control / sensor technology / layer systems / / URL www.fep.fraunhofer.de / /
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UBS-C2 Unipolar/bipolar switching unit for two channel Pulse Magnetron Sputtering Special features