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Opportunities for SUEX dry laminate resist in microfluidic MEMS applications Donald W Johnsona, Jost Goettertb, Varshni Singhb and Dawit Yemaneb a b
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Document Date: 2012-07-20 11:49:34
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File Size: 1,92 MB
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Opportunities for SUEX dry laminate resist in microfluidic MEMS applications Donald W Johnsona, Jost Goettertb, Varshni Singhb and Dawit Yemaneb a b