FLARION Series Plasma Reactors The FLARION series plasma reactors are custom designed for plasma-enhanced chemical vapour deposition (PECVD), plasma etching (PE), reactive or deep reactive ion etching (RIE, DRIE), or su

First Page		Document Content
Date: 2016-05-17 17:54:17		FLARION Series Plasma Reactors The FLARION series plasma reactors are custom designed for plasma-enhanced chemical vapour deposition (PECVD), plasma etching (PE), reactive or deep reactive ion etching (RIE, DRIE), or su Add to Reading List Source URL: www.plasmionique.com Download Document from Source Website File Size: 798,00 KB Share Document on Facebook