| Document Date: 2003-07-02 16:59:00
Open Document File Size: 1,13 MBShare Result on Facebook
City Munich / Silicon / / Company Clariant / Microsoft Research / HD MicroSystems / IOP Publishing Ltd / Agilent Technologies / Wyeth / Intel Corporation / Tanner Research Inc. / Oxford Instruments / / Country Germany / United States / / Currency USD / / / Facility University of Washington / / IndustryTerm metal / metal layer / blanket metal deposition / intracellular applications / planar processing / integrated devices / micro-needle devices / bare metal patch devices / neural networks / implantable tools / silicon needle silicon base release trench polyimide metal / final device / metal electrodes / interconnection devices / multi-site devices / chemical / metal films / manufacturing processes / / Movie PI / / Organization National Science Foundation / Lucile Packard Foundation / B¨ohringer Department of Electrical Engineering / University of Washington / Seattle / / Person Almeda Chem / Dennis Willows / / ProvinceOrState Washington / / Technology Neuroscience / MEMS / processing technology / /
SocialTag |
INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng[removed]S91–S95