![Semiconductor device fabrication / Glass physics / Nanotechnology / Etching / Microelectromechanical systems / Deep reactive-ion etching / Nanoelectromechanical system / Fracture / Focused ion beam / Materials science / Chemistry / Microtechnology Semiconductor device fabrication / Glass physics / Nanotechnology / Etching / Microelectromechanical systems / Deep reactive-ion etching / Nanoelectromechanical system / Fracture / Focused ion beam / Materials science / Chemistry / Microtechnology](https://www.pdfsearch.io/img/755379c4d018aa2bd297be925c15768f.jpg)
| Document Date: 2012-10-04 11:43:10 Open Document File Size: 203,60 KBShare Result on Facebook
Company Engineering Laboratory / / Currency USD / / / Facility Cornell University / Pennsylvania State University / / IndustryTerm microelectromechanical and nanoelectromechanical systems / manufacturing methods / mechanical test structures / non-contact devices / contact devices / actuator devices / chemical remnants / micro-mirror devices / web thickness / broken web sections / / NaturalFeature Materials Research Society Fall / / Organization the Pennsylvania State University / Ceramics Division / Center for Integrated Nanotechnology / Cornell University / / Person George Quinn Richard Gates Michael Gaither Quinn / Robert Cook George Quinn Richard / Frank W. DelRio / / / Position de Boer MP / / Technology laser / lithography / MEMS / NEMS technology / using lithography / / URL www.nist.gov/ceramics / /
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