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Professor M.Esashi was awarded "the Best Paper Award by the Institute of Electrical Engineers of Japan". Debris-Free Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS - Separation Method of Glass Layer -, IEEJ Tran
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Document Date: 2012-12-05 02:33:23
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Professor M.Esashi was awarded "the Best Paper Award by the Institute of Electrical Engineers of Japan". Debris-Free Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS - Separation Method of Glass Layer -, IEEJ Tran