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Stability of extreme ultraviolet multilayer coatings to low energy proton bombardment M.G. Pelizzo,1,2,* Alain Jody Corso,1,2 Paola Zuppella,1,2 D.L. Windt,3 G. Mattei,4 P. Nicolosi1,2 1
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Document Date: 2014-11-04 13:35:09
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Stability of extreme ultraviolet multilayer coatings to low energy proton bombardment M.G. Pelizzo,1,2,* Alain Jody Corso,1,2 Paola Zuppella,1,2 D.L. Windt,3 G. Mattei,4 P. Nicolosi1,2 1