| Document Date: 2014-04-30 17:20:46
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Company Perot / Technologies Inc. / Micro-ElectroMechanical Systems / Andrei M. Shkel Microsystems Laboratory / ANSYS / / Currency USD / / / Facility University of California / / IndustryTerm ashkel@uci.edu Web / technology offers / optical measurement devices / tunable device / versatile device / fabrication technology / research / technology affect performance / reduced processing steps / dielectric coating technology / micro-machining technology / light modulating applications / / Organization FR FD / U.S. Securities and Exchange Commission / University of California / Irvine / / Person Vijay K. Varadan / / Position author / Editor / / ProvinceOrState California / / Technology micro-machining technology / dielectric / DWDM / MEMS technology / simulation / fabrication technology / DWDM technology / dielectric coating technology / / URL http /
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Invited Paper Analysis of imperfections in a micromachined tunable-cavity interferometer Jung-sik Moon and Andrei M. Shkel Microsystems Laboratory, Department of Mechanical and Aerospace Engineering,