| Document Date: 2013-11-21 18:43:30
Open Document File Size: 1,21 MBShare Result on Facebook
Company AMF / Tennant / Advanced Research Department Laser Engineering / Advanced Laser Science Group / Basic / Advanced Research Department Atom Optics / / Facility National Institute of Information / / IndustryTerm lithographic holography technology / material processing technology / conventional optical lithography technology / singlemode tunable laser technologies / info-communications devices / atomic gas / fundamental technology / / Organization Research Center / National Institute of Information / D. Research Center / / Person Masayoshi High / / Position Group Leader / Supervisor / Senior Researcher / / Technology fundamental technology / laser / lithographic holography technology / Communications Technology / Lithography / material processing technology / conventional optical lithography technology / simulation / lasers / singlemode tunable laser technologies / /
SocialTag |
2-2 Atom Optics and Atom Lithography OHMUKAI Ryuzo and WATANABE Masayoshi High-resolution atomic channeling using velocity-selected atoms may be able to overcome precision limitations of the conventional atom lithography