| Document Date: 2008-02-19 04:00:27
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Company Microsystem Technologies / McGraw-Hill / / Currency pence / / / Facility FNRS Sart Tilman Campus / Building B28 / University of Li`ege / / IndustryTerm microelectromechanical systems / reference solution / epsilon algorithm / iterated theta algorithm / constitutive law / test chip / micro-device / / Organization University of Li`ege / Department of Electrical Engineering and Computer Science / / Person Ruth V / / Position Author / added conductor / additional conductor / vp / scalar vp / / PublishedMedium Smart Materials and Structures / / Technology microelectromechanical systems / MEMS / epsilon algorithm / simulation / 3-D / iterated theta algorithm / test chip / dielectric / / URL http /
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A Perturbation Method for the 3D Finite Element Modeling of Electrostatically Driven MEMS