VB ConfinedPhys26Jul04 University of California / INTRODUCTION ConfinedPhys26Jul04 University of California / Computer Sciences University of California Berkeley / ConfinedPhys26Jul04 University of California / PLASMA PLASMA TRANSPORT THROUGH SLOT ConfinedPhys26Jul04 University of California / University of California / Reza Sadjadi ConfinedPhys26Jul04 University of California / /
IndustryTerm
law sheath / energy / /
Organization
Electrical Engineering and Computer Sciences University / University of California / Berkeley / University of California / National Science Foundation / DUAL FREQUENCY CAPACITIVE DISCHARGE M.A. Lieberman Department of Electrical Engineering / /
Person
Doug Keil / J. Verboncoeur / J.T. Gudmundsson / Emi Kawamura / Alan Wu / Eric Hudson / /
IGNITION CONDITIONS FOR PERIPHERAL PLASMA IN A GROUNDED CHAMBER CONNECTED TO A DUAL FREQUENCY CAPACITIVE DISCHARGE