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 Electromagnetism Mechanical engineering Engineering Micro-Opto-Electro-Mechanical Systems Microtechnology Technology Microelectromechanical systems |
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| First Page | Document Content | |
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Electromagnetism Mechanical engineering Engineering Micro-Opto-Electro-Mechanical Systems Microtechnology Technology Microelectromechanical systems |
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PRISM Seminar Series – Fall 2008 The Challenges of Micro‐System Product Development James J. Allen, Ph.D., P.E. Advanced MEMS Technologies Sandia National Laboratories