![Electromagnetism / Microtechnology / ELETTRA / Trieste / X-ray lithography / Microelectromechanical systems / Synchrotron / Beamline / Physics / Particle accelerators / Materials science Electromagnetism / Microtechnology / ELETTRA / Trieste / X-ray lithography / Microelectromechanical systems / Synchrotron / Beamline / Physics / Particle accelerators / Materials science](https://www.pdfsearch.io/img/38a475b665bc6764d15e766e280ddc90.jpg)
| Document Date: 2012-10-15 05:11:07 Open Document File Size: 2,46 MBShare Result on Facebook
City Trieste / / Country Italy / / / IndustryTerm manufacturing process / high energy irradiation / / Organization United Nations / / Person Ray Lithography Perennes / Ray Lithography / / / Technology radiation / MEMS / X-ray / MICROFLUIDICS / Drug delivery system / / URL www.elettra.trieste.it / http /
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