Eelco

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71	IA-Netwerk Duitsland en Zwitserland Eelco van der Eijk, 29 april 2014, meer informatie: www.ianetwerk.nl Add to Reading List Source URL: www.rvo.nl Language: Dutch - Date: 2014-04-29 12:11:24
72 $Extreme ultraviolet lithography / Photomask / Ultraviolet / Reflectivity / Extreme ultraviolet / 100 nanometres / Refractive index / Color / Electromagnetic radiation / Physics / Optics$	Mask aspects of EUVL imaging at 27nm node and below Natalia Davydovaa,, Eelco van Settena, Sang-In Hand, Mark van de Kerkhof , Robert de Kruifa, Dorothe Oorschota, John Zimmermane, Ad Lammersa, Brid Add to Reading List Source URL: brion.com Language: English* - Date: 2013-04-19 19:56:51 Extreme ultraviolet lithography Photomask Ultraviolet Reflectivity Extreme ultraviolet 100 nanometres Refractive index Color Electromagnetic radiation Physics Optics