electronic devices / performance assessment tool / incident beam energy / high energy / electrical and chemical properties / gas-ionisation / plasma-enhanced chemical vapor deposition / film systems / functional devices / artificial neural networks / energy range / resonance energy / energy response function / /
Movie
Depth Profiling / For the first time / DEPTH PROFILING IAEA / VIENNA / /
Organization
International Atomic Energy Agency / Division of Physical and Chemical Sciences / /
Person
A. Markwitz / V / Guo Jiyu / A. Viera / V / /
Product
A-1400 Vienna / /
Technology
semiconductors / Markov Chain Monte Carlo algorithm / CVD / chemical vapor deposition / /
IAEA-TECDOC[removed]Ion beam techniques for the analysis of light elements in thin films, including depth profiling Final report of a co-ordinated research project